Silicon on ultra-low-loss waveguide photonic integration platform.

نویسندگان

  • Jared F Bauters
  • Michael L Davenport
  • Martijn J R Heck
  • J K Doylend
  • Arnold Chen
  • Alexander W Fang
  • John E Bowers
چکیده

We demonstrate a novel integrated silicon and ultra-low-loss Si3N4 waveguide platform. Coupling between layers is achieved with (0.4 ± 0.2) dB of loss per transition and a 20 nm 3-dB bandwidth for one tapered coupler design and with (0.8 ± 0.2) dB of loss per transition and a 100 nm 3-dB bandwidth for another. The minimum propagation loss measured in the ultra-low-loss waveguides is 1.2 dB/m in the 1590 nm wavelength regime.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits.

We design, fabricate, and demonstrate a silicon nitride (Si(3)N(4)) multilayer platform optimized for low-loss and compact multilayer photonic integrated circuits. The designed platform, with 200 nm thick waveguide core and 700 nm interlayer gap, is compatible for active thermal tuning and applicable to realizing compact photonic devices such as arrayed waveguide gratings (AWGs). We achieve ult...

متن کامل

Efficient coupling between Si3N4 photonic and hybrid slot-based CMOS plasmonic waveguide

Bringing photonics and electronics into a common integration platform can unleash unprecedented performance capabilities in data communication and sensing applications. Plasmonics were proposed as the key technology that can merge ultra-fast photonics and low-dimension electronics due to their metallic nature and their unique ability to guide light at sub-wavelength scales. However, inherent hi...

متن کامل

Photonic-electronic integration with polysilicon photonics in bulk CMOS

Here, I review the development of a polysilicon photonic platform that is optimized for integration with electronics fabricated on bulk silicon wafers. This platform enables large-scale monolithic integration of silicon photonics with microelectronics. A single-polysilicon deposition and lithography mask were used to simultaneously define the transistor gate, the low-loss waveguides, the deplet...

متن کامل

Ultra-low-loss Ta2O5-core/SiO2-clad planar waveguides on Si substrates

An increasing number of systems and applications depend on photonics for transmission and signal processing. This includes data centers, communications systems, environmental sensing, radar, lidar, and microwave signal generation. Such systems increasingly rely on monolithic integration of traditionally bulk optical components onto the chip scale to significantly reduce power and cost while sim...

متن کامل

Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon.

An ideal photonic integrated circuit for nonlinear photonic applications requires high optical nonlinearities and low loss. This work demonstrates a heterogeneous platform by bonding lithium niobate (LN) thin films onto a silicon nitride (Si3N4) waveguide layer on silicon. It not only provides large second- and third-order nonlinear coefficients, but also shows low propaga...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:
  • Optics express

دوره 21 1  شماره 

صفحات  -

تاریخ انتشار 2013